Design and Finite Element Analysis of Micromachined Piezoresistive Polyimide Nanocantilevers for Surface Stress Sensing Applications

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dc.contributor.advisor Mohapatra, Nihar Ranjan
dc.contributor.author Chandnani, Ashita
dc.date.accessioned 2014-09-16T10:50:03Z
dc.date.available 2014-09-16T10:50:03Z
dc.date.issued 2014-06
dc.identifier.citation Chandnani, Ashita (2014). Design and Finite Element Analysis of Micromachined Piezoresistive Polyimide Nanocantilevers for Surface Stress Sensing Applications (M. Tech. Dissertations). Indian Institute of Technology, Gandhinagar, pp. 53 (Acc No: T00024) en_US
dc.identifier.uri https://repository.iitgn.ac.in/handle/123456789/1401
dc.description.abstract The rapid progress in the field of micro- and nano- electromechanical systems (MEMS and NEMS) coupled with the advent of nanotechnology have led to the development of a very promising field of bioMEMS. A typical example of this class of devices are MEMS based sensors for biomolecular detection which use knowledge of various domains like biology, nanotechnology, microfabrication, material science, optics, electrical and mechanical engineering. This thesis explores the suitability of polyimide based nanocantilevers for surface stress sensing applications. Polyimide is a mechanically flexible biocompatible polymer. In our study, the cantilevers are modeled and analyzed using the commercial Finite Element Analysis tool oventorWare. The von Mises stress and the relative percentage change in resistance of the integrated polysilicon piezoresistor are analyzed by changing the geometric parameters of the cantilever. The effect of partial and complete etching of the cantilever structure near the clamped end is also studied. It is shown that these etched parts act as stress raisers and result in approximately 50 85% increase in surface stress sensitivity of the device. It is also shown that the effect of Joule heating on the thermal sensitivity is critical for overall improvement of signal to noise ratio of the device. en_US
dc.description.statementofresponsibility by Ashita Chandnani
dc.format.extent ix, 53 p.; col.; ill; 24 cm. + 1 CD-ROM
dc.language.iso en en_US
dc.publisher Indian Institute of Technology, Gandhinagar en_US
dc.subject CoventorWare en_US
dc.subject MEMS and NEMS en_US
dc.subject Nanocantilevers en_US
dc.subject Surface Stress en_US
dc.title Design and Finite Element Analysis of Micromachined Piezoresistive Polyimide Nanocantilevers for Surface Stress Sensing Applications en_US
dc.type Thesis en_US
dc.contributor.department Electrical Engineering
dc.description.degree M.Tech.


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