Lithography process model building using locally linear embedding

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dc.contributor.author Kumar, Pardeep
dc.contributor.author Srinivasan, Babji
dc.contributor.author Mohapatra, Nihar Ranjan
dc.contributor.other SISPAD 2015
dc.coverage.spatial US
dc.date.accessioned 2015-07-21T13:16:48Z
dc.date.available 2015-07-21T13:16:48Z
dc.date.issued 2015-09
dc.identifier.citation Kumar, Pardeep; Srinivasan, Babji and Mohapatra, Nihar Ranjan,"Lithography process model building using locally linear embedding", in the SISPAD 2015, University of Maryland, Washington DC, US, Sep. 9-11, 2015. en_US
dc.identifier.uri https://repository.iitgn.ac.in/handle/123456789/1819
dc.description.statementofresponsibility by Pardeep Kumar, Babji Srinivasan and Nihar Ranjan Mohapatra
dc.language.iso en en_US
dc.publisher University of Maryland, Washington en_US
dc.subject Lithography process model en_US
dc.subject linear embedding en_US
dc.title Lithography process model building using locally linear embedding en_US
dc.type Presentation en_US


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