Interpreting the conductive atomic force microscopy measured inhomogeneous nanoscale surface electrical properties of Al-doped ZnO films

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dc.contributor.author Patel, Tvarit
dc.contributor.author Panda, Emila
dc.date.accessioned 2016-06-09T12:59:43Z
dc.date.available 2016-06-09T12:59:43Z
dc.date.issued 2016-12
dc.identifier.citation Patel, Tvarit and Panda, Emila, “Interpreting the conductive atomic force microscopy measured inhomogeneous nanoscale surface electrical properties of Al-doped ZnO films”, Surface and Interface Analysis, DOI: 10.1002/sia.6048, vol. 48, no. 13, pp. 1384-1391, Dec. 2016.
dc.identifier.issn 0142-2421
dc.identifier.uri https://repository.iitgn.ac.in/handle/123456789/2312
dc.identifier.uri http://dx.doi.org/10.1002/sia.6048
dc.description.abstract In this work, conductive atomic force microscopy is used to study the inhomogeneous surface electrical conductivity of Al-doped ZnO thin films at a nanoscale dimension. To this end, Al-doped ZnO films were deposited onto the soda lime glass substrates at substrate temperature (Ts) varying from 303 to 673 K in radio frequency magnetron sputtering. The obtained local surface electrical conductivity values are found to be influenced by their bulk electrical resistivity, surface topography and tip geometry. Further, the average (local) surface conductivity from the film surface is found to increase with increasing Ts from 303 to 623 K, beyond which they decrease until 673 K. en_US
dc.description.statementofresponsibility by Tvarit Patel and Emila Panda
dc.format.extent Vol. 48, no. 13, pp. 1384-1391
dc.language.iso en_US en_US
dc.publisher Wiley en_US
dc.subject Conductive AFM en_US
dc.subject Al-doped ZnO en_US
dc.subject Nanoscale Surface Conductivity en_US
dc.subject Surface Roughness en_US
dc.subject C-AFM tip en_US
dc.title Interpreting the conductive atomic force microscopy measured inhomogeneous nanoscale surface electrical properties of Al-doped ZnO films en_US
dc.type Article en_US
dc.relation.journal Surface and Interface Analysis


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