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  • Kumar, Pardeep; Barai, Samit; Srinivasan, Babji; Mohapatra, Nihar Ranjan (Springer, 2014)
    Full chip resist simulation is a critical step in the lithography simulation of advanced CMOS technology nodes. The semi-empirical compact models (such as compact model 1, also known as CM1) are generally used in the ...

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