Random forest based robust classification for lithographic hotspot detection

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dc.contributor.author Dawar, Rohit
dc.contributor.author Samit Barai
dc.contributor.author Kumar, Pardeep
dc.contributor.author Srinivasan, Babji
dc.contributor.author Mohapatra, Nihar Ranjan
dc.date.accessioned 2019-04-24T06:26:17Z
dc.date.available 2019-04-24T06:26:17Z
dc.date.issued 2019-04
dc.identifier.citation Dawar, Rohit; Samit Barai; Kumar, Pardeep; Babji, Srinivasan and Mohapatra, Nihar, �Random forest based robust classification for lithographic hotspot detection�, Journal of Micro/Nanolithography, MEMS, and MOEMS, Apr. 2019. en_US
dc.identifier.uri https://repository.iitgn.ac.in/handle/123456789/4399
dc.description.statementofresponsibility by Rohit Dawar, Samit Barai, Pardeep Kumar, Srinivasan Babji and Nihar Mohapatra
dc.language.iso en en_US
dc.publisher Society of Photo-optical Instrumentation Engineers (SPIE) en_US
dc.title Random forest based robust classification for lithographic hotspot detection en_US
dc.type Article en_US
dc.relation.journal Journal of Micro/Nanolithography, MEMS, and MOEMS


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