Duhan, Pardeep; Ganeriwala, Mohit D.; Rao, V. Ramgopal; Mohapatra, Nihar Ranjan
(IEEE, 2015-08)
This letter analyzes the width dependence of gate current observed in nMOS transistors fabricated using the 28-nm gate-first CMOS process. It is experimentally shown that the gate current density is ~10× lower for 80-nm ...