Mohapatra, Nihar RanjanNath, BiplobBiplobNath2025-09-042025-09-042020-01-01https://repository.iitgn.ac.in/handle/IITG2025/32205ill.; 30 cm.en-US18250007Electrical EngineeringOptical LithographyMicro LithographyMachine LearningLithography Process VariationParametric analysis based identification of yield detractor patterns from ULSI layoutsM.Tech Thesesix, 60p.123456789/500