Mohapatra, Nihar RanjanNath, BiplobBiplobNath2025-09-042025-09-042020-01-01http://repository.iitgn.ac.in/handle/IITG2025/32205ill.; 30 cm.18250007Electrical EngineeringOptical LithographyMicro LithographyMachine LearningLithography Process VariationParametric analysis based identification of yield detractor patterns from ULSI layoutsM.Techix, 60p.M.Tech123456789/500