Srinivasan, BabjiMohapatra, Nihar RanjanKumar, PardeepPardeepKumar2025-09-042025-09-042019-01-01https://repository.iitgn.ac.in/handle/IITG2025/32181ill.; 30 cm.en-US12310006Electrical EngineeringPrincipal Component AnalysisDiscrete Cosine TransformOptical Proximity CorrectionLithography SimulationModeling and optimization techniques for efficient lithography simulationPh.D. Thesesxix, 142p.123456789/500