Mohapatra, Nihar RanjanPrasath K, NarendiraNarendiraPrasath K2025-10-102025-10-102025-01-01http://repository.iitgn.ac.in0/handle/IITG2025/32980hbk.: 30 cm.en-US23250027M. TechElectrical EngineeringPhotolithographyOptical ModelsComputLithoGPUsAccelerationRobustnessOptical Modeling and GPU acceleration in computational lithographyM.Techxxi, 82p.123456789/500