Hotspot detection in lithographic patterns using machine learning technique

Mohapatra, Nihar RanjanSrinivasan, BabjiDawar, RohitRohitDawar2025-09-042025-09-042018-01-01http://repository.iitgn.ac.in/handle/IITG2025/3223216210077Semiconductor IndustryResolution Enhancement TechniquesAerial Image IntensityLithography SimulatorsGeometrical ParametersHotspot detection in lithographic patterns using machine learning techniqueM.Techix, 69p123456789/500