Relating surface and bulk electronic properties of Al-doped ZnO films deposited at varying substrate temperature by RF magnetron sputtering

Singh, Chetan C.Chetan C.SinghPatel, TvaritTvaritPatelPanda, EmilaEmilaPanda2025-09-042025-09-042015-07-01http://repository.iitgn.ac.in/handle/IITG2025/31102en-USSurface and bulk electronicAl-doped ZnO filmsVarying substrate temperatureRelating surface and bulk electronic properties of Al-doped ZnO films deposited at varying substrate temperature by RF magnetron sputteringConference Paper123456789/573