Parametric source-mask optimization using hybrid gradient descent and bayesian optimization

Joglekar, RadhikaRadhikaJoglekarKumar, PardeepPardeepKumarMohapatra, Nihar RanjanNihar RanjanMohapatra2026-03-132026-03-132025-12-1310.1109/ICEE67165.2025.11409950https://repository.iitgn.ac.in/handle/IITG2025/34813en-USSMOBayesian optimizationILTParametric sourcesParametric source-mask optimization using hybrid gradient descent and bayesian optimizationConference Paper