Mohanty, SiddharthSiddharthMohantySwain, Sandeep KumarSandeep KumarSwainMaheshwari, OmOmMaheshwariKumar, PardeepPardeepKumarMohapatra, Nihar RanjanNihar RanjanMohapatra2026-03-132026-03-132025-12-1310.1109/ICEE67165.2025.11409843https://repository.iitgn.ac.in/handle/IITG2025/34821en-USPlasma modelPlasma bulkSheathIon Energy Distribution Function (IEDF)Semiconductor process simulationComputPlasma � an indigenous plasma simulator for semiconductor process modelingConference Paper