Sample plan selection techniques for Lithography process model building

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dc.contributor.author Kumar, Pardeep
dc.contributor.author Srinivasan, Babji
dc.contributor.author Mohapatra, Nihar Ranjan
dc.date.accessioned 2018-10-04T12:52:44Z
dc.date.available 2018-10-04T12:52:44Z
dc.date.issued 2018-09
dc.identifier.citation Kumar, Pardeep; Srinivasan, Babji and Mohapatra, Nihar, "Sample plan selection techniques for Lithography process model building", Journal of Micro/Nanolithography, MEMS, and MOEMS, Sep. 2018. en_US
dc.identifier.issn 0004-6361
dc.identifier.issn 1432-0746
dc.identifier.uri https://doi.org/10.1117/1.JMM.17.2.023503
dc.identifier.uri https://repository.iitgn.ac.in/handle/123456789/3933
dc.description.abstract Kumar, Pardeep; Srinivasan, Babji and Mohapatra, Nihar, "Sample plan selection techniques for Lithography process model building", Journal of Micro/Nanolithography, MEMS, and MOEMS, Sep. 2018.
dc.description.statementofresponsibility by Pardeep Kumar, Babji Srinivasan and Nihar R. Mohapatra
dc.language.iso en en_US
dc.publisher Society of Photo-optical Instrumentation Engineers en_US
dc.subject Calibration en_US
dc.subject Data modeling en_US
dc.subject Process modeling en_US
dc.subject Autoregressive models en_US
dc.subject Lithography en_US
dc.subject Photomasks en_US
dc.subject Monte Carlo methods en_US
dc.title Sample plan selection techniques for Lithography process model building en_US
dc.type Article en_US
dc.relation.journal Journal of Micro/Nanolithography, MEMS, and MOEMS


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