Modeling and optimization techniques for efficient lithography simulation

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dc.contributor.advisor Srinivasan, Babji
dc.contributor.author Kumar, Pardeep
dc.date.accessioned 2019-08-29T09:48:14Z
dc.date.available 2019-08-29T09:48:14Z
dc.date.issued 2019
dc.identifier.citation Kumar, Pardeep (2019). Modeling and optimization techniques for efficient lithography simulation. Gandhinagar: Indian Institute of Technology Gandhinagar, 142p.(Acc. No.: T00507).
dc.identifier.uri https://repository.iitgn.ac.in/handle/123456789/4753
dc.description.statementofresponsibility by Pardeep Kumar
dc.format.extent xix, 142p. : ill. ; 30 cm.
dc.language.iso en_US
dc.publisher Indian Institute of Technology Gandhinagar
dc.title Modeling and optimization techniques for efficient lithography simulation
dc.type Thesis
dc.contributor.department Electrical Engineering
dc.description.degree Ph.D.


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