Kumar, Pardeep; Srinivasan, Babji; Mohapatra, Nihar Ranjan
(Society of Photo-optical Instrumentation Engineers, 2018-09)
Kumar, Pardeep; Srinivasan, Babji and Mohapatra, Nihar, "Sample plan selection techniques for Lithography process model building", Journal of Micro/Nanolithography, MEMS, and MOEMS, Sep. 2018.