Optical Modeling and GPU acceleration in computational lithography

dc.contributor.advisor	Mohapatra, Nihar Ranjan
dc.contributor.author	Prasath K, Narendira
dc.date.accessioned	2025-09-11T15:52:56Z
dc.date.available	2025-09-11T15:52:56Z
dc.date.issued	2025
dc.identifier.citation	Prasath K, Narendira. (2025). Optical Modeling and GPU acceleration in computational lithography. Gandhinagar: Indian Institute of Technology Gandhinagar, 82p. (Acc. No.: T01531)
dc.identifier.uri	https://repository.iitgn.ac.in/handle/123456789/12034
dc.description.statementofresponsibility	by Narendira Prasath K
dc.format.extent	xxi, 82p.: hbk.: 30 cm
dc.language.iso	en_US
dc.publisher	Indian Institute of Technology Gandhinagar
dc.subject	23250027
dc.subject	M. Tech
dc.subject	Electrical Engineering
dc.subject	Photolithography
dc.subject	Optical Models
dc.subject	ComputLitho
dc.subject	GPUs
dc.subject	Acceleration
dc.subject	Robustness
dc.title	Optical Modeling and GPU acceleration in computational lithography
dc.type	Thesis
dc.contributor.department	Electrical Engineering
dc.description.degree	M.Tech.