| dc.contributor.author | Kumar, Pardeep | |
| dc.contributor.author | Srinivasan, Babji | |
| dc.contributor.author | Mohapatra, Nihar Ranjan | |
| dc.contributor.other | The International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2015) | |
| dc.coverage.spatial | Washington DC, US | |
| dc.date.accessioned | 2012-09-26T07:22:29Z | |
| dc.date.available | 2012-09-26T07:22:29Z | |
| dc.date.issued | 09-09-15 | |
| dc.identifier.citation | Kumar, Pardeep; Srinivasan, Babji and Mohapatra, Nihar Ranjan,, "Lithography process model building using locally linear embedding", in the The International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2015), University of Maryland, Washington DC, US, Sep. 9-11, 2015. | en_US |
| dc.identifier.uri | https://repository.iitgn.ac.in/handle/123456789/6598 | |
| dc.description.statementofresponsibility | by Pardeep Kumar, Babji Srinivasan and Nihar Ranjan Mohapatra | |
| dc.language.iso | en_US | en_US |
| dc.title | Lithography process model building using locally linear embedding | en_US |
| dc.type | Article | en_US |
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