ComputPlasma � an indigenous plasma simulator for semiconductor process modeling

Source
IEEE 7th International Conference on Emerging Electronics (ICEE 2025)
Date Issued
2025-12-13
Author(s)
Mohanty, Siddharth
Swain, Sandeep Kumar
Maheshwari, Om
Kumar, Pardeep
DOI
URI
Subjects
Plasma model
Plasma bulk
Sheath
Ion Energy Distribution Function (IEDF)
Semiconductor process simulation