Parasitic capacitance analysis in tapered CFET devices for advanced technology nodes
Source
IEEE 7th International Conference on Emerging Electronics (ICEE 2025)
Date Issued
2025-12-13
Author(s)
Pal, Jaisingh
Subjects
CFET
Parasitic capacitance
Taper angle
Process variation
3D TCAD
Elliptical integral method
Trapezoid