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  1. Home
  2. IIT Gandhinagar
  3. Electrical Engineering
  4. EE Theses (PhD & Masters)
  5. Modeling and optimization techniques for efficient lithography simulation
 
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Modeling and optimization techniques for efficient lithography simulation

Source
Indian Institute of Technology, Gandhinagar
Date Issued
2019-01-01
Author(s)
Kumar, Pardeep
URI
https://repository.iitgn.ac.in/handle/IITG2025/32181
Subjects
12310006
Electrical Engineering
Principal Component Analysis
Discrete Cosine Transform
Optical Proximity Correction
Lithography Simulation
File(s)
T00507.pdf (16.46 MB)
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